LEICA DCM8 MICROSCOPIO CONFOCALE ED INTERFEROMETRICO
Leica DCM8 microscopio confocale ed interferometrico
Strumento dedicato all”analisi ad alta precisione delle superfici utilizzando la tecnica confocale ed interferometrica
LEICA DCM8 MICROSCOPIO CONFOCALE ED INTERFEROMETRICO
Descrizione
Specifiche generali
Measuring Principle Dual Core Optical Imaging Profilometry (Confocal and Interferometry) non-contact, 3D Capabilities HD Imaging, HD 3D Topography, Profiles, Coordinates, Thickness, Roughness, Volume, Surface Texture, Spectral Analysis, Color Analysis, etc.
Contrast modes HD Confocal, HD Interferometry (PSI, ePSI, VSI), HD Brightfield Color, Brightfield, Darkfield, Real Time HD RGB Confocal Sample height 40 mm standard; up to 150 mm with adjustable column; larger sample height possible on request
Objectives From 1.25× up to 150× in confocal, brightfield and darkfield mode; from 5x up to 50×
in interferometry mode Nosepiece 6-fold objective revolver manual / 6-fold objective revolver motorized Stage scan range (x,y,z) Vertical: z = 40 mm; lateral: xy = standard 100 x 75 mm or up to 300 x 300 mm. Larger stages possible on request. Vertical scan range Confocal 40 mm, PSI 20 mm, ePSI 100 mm, VSI 10 mm Illumination LED light sources: red (630 nm), green (530 nm), blue (460 nm) and white Image Acquisition CCD B&W Sensor: 1360 x 1024 pixels (full resolution); B&W 35 FPS True Color / Confocal: 3 FPS (full resolution), 10 FPS (half resolution), 15 FPS Live Confocal Sample Reflectivity 0.1% – 100%
Dimensions & weight L x W x H = 573 mm x 390 mm x 569 mm; weight: 48 kg
Operating conditions Temperature: 10° to 35° C; Relative Humidity (RH) < 80%; RH altitude < 2000 m
Vibration Isolation Active or passive
Repeatability (50 x magnification) Confocal / VSI: error = 0.003 mm (3 nm); PSI: error = 0.16 nm (0.00016 mm)
Accuracy (20 x magnification) With open loop: < 3% relative error; with closed loop: < 20 nm error
Confocal Mode
Objective Magnification 1.25× 2.5× 5× 10× 20× 50× 100× 150×
Numerical Aperture 0.04 0.07 0.15 0.3 0.5 0.9 0.95 0.95
Optical Resolution (X/Y) (μm) 3.5 2.0 0.94 0.47 0.28 0.16 0.14 0.14
Vertical Resolution (nm) <3000 <350 <150 <30 <15 <5 <2 <2
Typical Measurement Time 3 – 5 seconds
Interferometry Mode
Objective Magnification 5× 10× 20× 50×
Numerical Aperture 0.15 0.30 0.40 0.50
FOV (μm) 3508 x 2640 1754 x 1320 677 x 660 351 x 264
Optical Resolution Blue (x/y) (μm) 0.94 0.47 0.35 0.28
Optical Resolution White (x/y) (μm) 1.12 0.56 0.42 0.33
Vertical Resolution (nm) PSI <0.1; ePSI < 1.0; VSI < 3.0
Vertical Scanning Speed (μm/s) VSI / ePSI: 2.4 – 17 μm/s
Typical Measurement Time PSI: 3 – 6 secs; VSI: 10secs; ePSI: 30 secs
